Tantalum electrodeposition using a nanoporous anodic alumina template and a nanostructured gold/nickel-chromium glass-ceramic substrate

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dc.contributor.authorŠimůnková, Helenacs
dc.contributor.authorKolíbalová, Evacs
dc.contributor.authorKalina, Lukášcs
dc.contributor.authorLednický, Tomášcs
dc.contributor.authorBábor, Petrcs
dc.contributor.authorHubálek, Jaromírcs
dc.coverage.issue1cs
dc.coverage.volume239cs
dc.date.accessioned2025-08-06T11:00:11Z
dc.date.available2025-08-06T11:00:11Z
dc.date.issued2025-05-21cs
dc.description.abstractThe electrodeposition and analysis of tantalum (Ta) nanotube arrays prepared from an ionic liquid, 1-butyl-1methylpyrrolidinium bis(trifluoro-methylsulfonyl) imide (BMP[Tf2N]), using a porous anodic alumina (PAA) template are newly presented. Free-standing and spatially separated tantalum nanotube arrays were achieved after selective etching of the PAA. The high-rate electrodeposition of the nanotube arrays took only 10 s and achieved approximately 70 atomic percent Ta metal. Superficial X-ray photoelectron spectroscopy supplemented by an argon ion etching and depth profiling has proven the presence of tantalum metal. Additionally, tantalum electrodeposition was attempted using a sputter-deposited gold coating on a planar glass-ceramic substrate as the working electrode. Pores emerged within the sputter-deposited gold layer as a side result of the Ta electrodeposition step. Nano-to submicrometer large pores were created due to a foreign element penetration into the gold and etching effect of fluorides contained in the ionic liquid solution.en
dc.description.embargo2027-05-21cs
dc.formattextcs
dc.format.extent1-8cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationVacuum. 2025, vol. 239, issue 1, p. 1-8.en
dc.identifier.doi10.1016/j.vacuum.2025.114438cs
dc.identifier.issn0042-207Xcs
dc.identifier.orcid0000-0003-1800-4686cs
dc.identifier.orcid0000-0002-8548-8185cs
dc.identifier.orcid0000-0001-8127-8175cs
dc.identifier.orcid0000-0003-0564-1862cs
dc.identifier.orcid0000-0002-4948-1883cs
dc.identifier.orcid0000-0002-7496-2558cs
dc.identifier.other198167cs
dc.identifier.researcheridD-7753-2012cs
dc.identifier.scopus25926769300cs
dc.identifier.scopus55255338000cs
dc.identifier.scopus57207501711cs
dc.identifier.urihttps://hdl.handle.net/11012/255394
dc.language.isoencs
dc.publisherPERGAMON-ELSEVIER SCIENCE LTDcs
dc.relation.ispartofVacuumcs
dc.relation.urihttps://www.sciencedirect.com/science/article/pii/S0042207X25004282cs
dc.rightsCreative Commons Attribution-NonCommercial-NoDerivatives 4.0 Internationalcs
dc.rights.accessembargoedAccesscs
dc.rights.sherpahttp://www.sherpa.ac.uk/romeo/issn/0042-207X/cs
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/cs
dc.subjectTantalum electrodepositionen
dc.subjectVacuum annealingen
dc.subjectNanostructured tantalumen
dc.subjectNanoporous golden
dc.subjectScanning transmission electron microscopyen
dc.titleTantalum electrodeposition using a nanoporous anodic alumina template and a nanostructured gold/nickel-chromium glass-ceramic substrateen
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionacceptedVersionen
sync.item.dbidVAV-198167en
sync.item.dbtypeVAVen
sync.item.insts2025.08.06 13:00:11en
sync.item.modts2025.08.06 12:33:59en
thesis.grantorVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií. Ústav mikroelektronikycs
thesis.grantorVysoké učení technické v Brně. Fakulta chemická. Ústav chemie materiálůcs
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Chytré nanonástrojecs
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Sdílená laboratoř RP1cs
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