Anodic formation and SEM characterization of zirconium oxide nanostructured films

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dc.contributor.authorKamnev, Kirillcs
dc.contributor.authorPrášek, Jancs
dc.contributor.authorMozalev, Alexandercs
dc.date.accessioned2021-05-04T10:54:20Z
dc.date.available2021-05-04T10:54:20Z
dc.date.issued2020-10-01cs
dc.description.abstractZirconium oxide (ZrO2) is a widely utilized inorganic material with excellent dielectric, optical, and biocompatible characteristics. The properties and areas of the ZrO2 applications can be further broadened by making the material nanostructured. In this work, anodic ZrO2 nanostructured films were developed and characterized by scanning electron microscopy. The films were prepared by anodizing magnetron-sputtered Al/Zr bilayers in two regimes: galvanostatic/potentiostatic anodizing in (COOH)2 and H2SO4 solutions (anodized films) and that followed by the high-speed reanodizing to a significantly higher anodic voltage (reanodized films). The growth of a porous anodic alumina (PAA) layer followed by PAA-assisted oxidation of the Zr underlayer was achieved. The anodized films consist of arrays of self-organized spatially ordered ZrO2 nanohillocks while the reanodized films comprise arrays of vertically aligned ZrO2 nanorods. The growth of amorphous ZrO2 nanohillocks and nanorods within the alumina pores via migration of Zr4+ cations is a unique situation for anodic films on zirconium, which normally grow crystalline and by O2- anion transport at the oxide/metal interface only. The achievement is a milestone towards understanding the ion transport during the PAA-assisted anodization of valve metals with low cation transport numbersen
dc.formattextcs
dc.format.extent631-636cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationNANOCON Conference Proceedings - International Conference on Nanomaterials, Volume 2020-October. 2020, p. 631-636.en
dc.identifier.doi10.37904/nanocon.2019.8711cs
dc.identifier.isbn978-80-8729-495-6cs
dc.identifier.other170560cs
dc.identifier.urihttp://hdl.handle.net/11012/196681
dc.language.isoencs
dc.publisherTangercs
dc.relation.ispartofNANOCON Conference Proceedings - International Conference on Nanomaterials, Volume 2020-Octobercs
dc.relation.urihttps://www.confer.cz/nanocon/2019/115-anodic-formation-and-sem-characterization-of-zirconium-oxide-nanostructured-filmscs
dc.rightsCreative Commons Attribution 4.0 Internationalcs
dc.rights.accessopenAccesscs
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/cs
dc.subjectAnodizingen
dc.subjectElectron microscopyen
dc.subjectNanostructureen
dc.subjectPorous anodic aluminaen
dc.subjectZirconium oxideen
dc.titleAnodic formation and SEM characterization of zirconium oxide nanostructured filmsen
dc.type.driverconferenceObjecten
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
sync.item.dbidVAV-170560en
sync.item.dbtypeVAVen
sync.item.insts2021.12.17 20:54:47en
sync.item.modts2021.12.17 20:15:03en
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Chytré nanonástrojecs
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Středoevropský technologický institut VUTcs
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Sdílená laboratoř RP1cs
thesis.grantorVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií. Ústav mikroelektronikycs
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Středoevropský technologický institut VUT
Chytré nanonástroje
Sdílená laboratoř RP1
Ústav mikroelektroniky