MoOx-based high-density nanoarrays on a substrate via smart anodizing as novel 3D electrodes for nano-energy applications

Abstract

For the first time, arrays of MoOx-based nanostructures of various sizes and morphologies, vertically aligned on a substrate, have been synthesized self-organized via the PAA-assisted anodization of a Mo layer through a very thin Nb interlayer. Such a smart anodization enabled the nucleation and sustainable growth of fully amorphous MoOx nanostructures within and under the PAA nanopores, which is impossible by direct molybdenum anodizing or other methods. The MoOx-based nanoarrays revealed the potential for applications in semiconductor nanoelectronics where the intensive and localized at the nanoscale electron transport, reversible redox reactions, high population density of nanochannels, and tailored crystallinity are in demand. The disclosed intercalation pseudocapacitance behavior of the rods' cores and the competitive performance metrics make the films promising as nanostructured electrodes for on-chip energy-related applications. The works to improve the electron-transport properties of the shells, explore field-emission and memristive potentials of the nanoarrays, and design relevant device configurations are in progress and will be reported in due course.For the first time, arrays of MoOx-based nanostructures of various sizes and morphologies, vertically aligned on a substrate, have been synthesized self-organized via the PAA-assisted anodization of a Mo layer through a very thin Nb interlayer. Such a smart anodization enabled the nucleation and sustainable growth of fully amorphous MoOx nanostructures within and under the PAA nanopores, which is impossible by direct molybdenum anodizing or other methods. The MoOx-based nanoarrays revealed the potential for applications in semiconductor nanoelectronics where the intensive and localized at the nanoscale electron transport, reversible redox reactions, high population density of nanochannels, and tailored crystallinity are in demand. The disclosed intercalation pseudocapacitance behavior of the rods' cores and the competitive performance metrics make the films promising as nanostructured electrodes for on-chip energy-related applications. The works to improve the electron-transport properties of the shells, explore field-emission and memristive potentials of the nanoarrays, and design relevant device configurations are in progress and will be reported in due course.