Anodic formation of HfO2 nanostructure arrays for resistive switching application
dc.contributor.author | Kamnev, Kirill | cs |
dc.contributor.author | Pytlíček, Zdeněk | cs |
dc.contributor.author | Prášek, Jan | cs |
dc.contributor.author | Mozalev, Alexander | cs |
dc.date.issued | 2021-01-01 | cs |
dc.description.abstract | Thin dielectric films are actively investigated as materials for novel resistive random-access memories based on resistive switching effect in metal/insulator/metal structures. Thin HfO2 films are of particular interest due to the high thermal stability, low operating voltages of resulting devices, and complementary metal-oxide-semiconductor technology compatibility of this material. In this study, we investigate the resistive switching behavior of nanostructured HfO2 film embedded in a porous anodic alumina matrix. The film was synthesized via self-organized electrochemical anodizing of a sputter-deposited Al/Hf bilayer on a Si substrate in an oxalic acid solution. The film was investigated by scanning electron microscopy. Simple metal/insulator/metal devices were prepared by sputter-deposition of Pt top electrodes through a shadow mask onto the nanostructured film. Assembled devices were characterized by I-V measurements. A bipolar eight-wise resistive switching was obtained, demonstrating a highly repeatable and stable low-voltage behavior in a set potential range. The achieved results indicate the high potential of the anodizing technique as an alternative to commonly used methods for producing insulating thin films for resistive random-access memory application. | en |
dc.format | text | cs |
dc.format.extent | 122-126 | cs |
dc.format.mimetype | application/pdf | cs |
dc.identifier.citation | Proceedings 12th International Conference on Nanomaterials - Research & Application. 2021, p. 122-126. | en |
dc.identifier.doi | 10.37904/nanocon.2020.3692 | cs |
dc.identifier.isbn | 978-80-87294-98-7 | cs |
dc.identifier.orcid | 0000-0001-8999-5363 | cs |
dc.identifier.orcid | 0000-0002-9116-7740 | cs |
dc.identifier.orcid | 0000-0003-1228-5712 | cs |
dc.identifier.orcid | 0000-0002-9505-5359 | cs |
dc.identifier.other | 174112 | cs |
dc.identifier.researcherid | AAC-6166-2019 | cs |
dc.identifier.researcherid | E-2387-2012 | cs |
dc.identifier.researcherid | H-3928-2012 | cs |
dc.identifier.scopus | 57193340784 | cs |
dc.identifier.scopus | 56845730100 | cs |
dc.identifier.scopus | 7003947942 | cs |
dc.identifier.scopus | 6601972151 | cs |
dc.identifier.uri | http://hdl.handle.net/11012/203206 | |
dc.language.iso | en | cs |
dc.publisher | TANGER LTD | cs |
dc.relation.ispartof | Proceedings 12th International Conference on Nanomaterials - Research & Application | cs |
dc.relation.uri | https://www.confer.cz/nanocon/2020/3692-anodic-formation-of-hfo2-nanostructure-arrays-for-resistive-switching-application | cs |
dc.rights | Creative Commons Attribution 4.0 International | cs |
dc.rights.access | openAccess | cs |
dc.rights.uri | http://creativecommons.org/licenses/by/4.0/ | cs |
dc.subject | Resistive switching | en |
dc.subject | anodizing | en |
dc.subject | hafnium oxide | en |
dc.subject | porous anodic alumina | en |
dc.subject | memristor | en |
dc.title | Anodic formation of HfO2 nanostructure arrays for resistive switching application | en |
dc.type.driver | conferenceObject | en |
dc.type.status | Peer-reviewed | en |
dc.type.version | publishedVersion | en |
sync.item.dbid | VAV-174112 | en |
sync.item.dbtype | VAV | en |
sync.item.insts | 2025.02.03 15:41:07 | en |
sync.item.modts | 2025.01.17 18:38:51 | en |
thesis.grantor | Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií. Ústav mikroelektroniky | cs |
thesis.grantor | Vysoké učení technické v Brně. Středoevropský technologický institut VUT. Chytré nanonástroje | cs |
thesis.grantor | Vysoké učení technické v Brně. Středoevropský technologický institut VUT. Sdílená laboratoř RP1 | cs |
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