Electrical and optical study of transparent V-based oxide semiconductors prepared by magnetron sputtering under different conditions

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dc.contributor.authorProciow, Eugeniusz
dc.contributor.authorZielinski, Maciej
dc.contributor.authorSieradzka, Karolina
dc.contributor.authorDomaradzki, Jaroslaw
dc.contributor.authorKaczmarek, Danuta
dc.coverage.issue1cs
dc.coverage.volume20cs
dc.date.accessioned2016-02-26T08:17:27Z
dc.date.available2016-02-26T08:17:27Z
dc.date.issued2011-04cs
dc.description.abstractThis work is focused on structural, optical and electrical behaviors of vanadium-based oxide thin films prepared by magnetron sputtering under different conditions. Thin films have been deposited on glass substrates from metallic vanadium target at low sputtering pressure. Different working gases: argon/oxygen mixture, and especially pure oxygen gas, have been applied. Results of X-ray diffraction together with optical transmission and temperature- dependent electrical resistivity measurements have been presented. Transmission coefficient, cut-off wavelength and the width of the optical band gap have been calculated from optical measurements. The d.c. resistivity values at room temperature and thermal activation energy have been obtained from electrical investigations. The influence of sputtering process conditions on optical and electrical properties has been discussed.en
dc.formattextcs
dc.format.extent204-208cs
dc.format.mimetypeapplication/pdfen
dc.identifier.citationRadioengineering. 2011, vol. 20, č. 1, s. 204-208. ISSN 1210-2512cs
dc.identifier.issn1210-2512
dc.identifier.urihttp://hdl.handle.net/11012/56819
dc.language.isoencs
dc.publisherSpolečnost pro radioelektronické inženýrstvícs
dc.relation.ispartofRadioengineeringcs
dc.relation.urihttp://www.radioeng.cz/fulltexts/2011/11_01_204_208.pdfcs
dc.rightsCreative Commons Attribution 3.0 Unported Licenseen
dc.rights.accessopenAccessen
dc.rights.urihttp://creativecommons.org/licenses/by/3.0/en
dc.subjectMagnetron sputteringen
dc.subjectvanadium oxideen
dc.subjectoptical propertiesen
dc.subjectelectrical propertiesen
dc.titleElectrical and optical study of transparent V-based oxide semiconductors prepared by magnetron sputtering under different conditionsen
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
eprints.affiliatedInstitution.facultyFakulta eletrotechniky a komunikačních technologiícs
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