Micromachined Gas Sensors Based on Au-functionalized SnO2 Nanorods Directly Integrated without Catalyst Seeds via AA-CVD

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dc.contributor.authorVallejos Vargas, Stellacs
dc.contributor.authorSelina, Soultanacs
dc.contributor.authorAnnanouch, Fatimacs
dc.contributor.authorGrácia, Isabelcs
dc.contributor.authorLlobet, Eduardcs
dc.contributor.authorBlackman, Chriscs
dc.coverage.issue1cs
dc.coverage.volume168cs
dc.date.accessioned2021-12-10T11:52:15Z
dc.date.available2021-12-10T11:52:15Z
dc.date.issued2016-09-07cs
dc.description.abstractTin oxide nanorods functionalized with Au nanoparticles are vapour synthesised at relatively lower temperatures than previously reported and without the need of catalyst seeds using co-deposition method via aerosol-assisted chemical vapour deposition. These functionalized structures formed directly, in a single-step process, on silicon micromachined platforms are tested toward H2, showing 12-fold greater response, 6-fold faster response time and better selectivity to CO compared to a similar non-functionalized system. Results show the significance of these method to form highly gas sensitive nanostructures compatible with the complementary electronic for the fabrication of gas microsensor devices.en
dc.formattextcs
dc.format.extent1078-1081cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationProcedia Engineering. 2016, vol. 168, issue 1, p. 1078-1081.en
dc.identifier.doi10.1016/j.proeng.2016.11.344cs
dc.identifier.issn1877-7058cs
dc.identifier.other142013cs
dc.identifier.urihttp://hdl.handle.net/11012/203144
dc.language.isoencs
dc.publisherElseviercs
dc.relation.ispartofProcedia Engineeringcs
dc.relation.urihttps://www.sciencedirect.com/science/article/pii/S187770581633658Xcs
dc.rightsCreative Commons Attribution-NonCommercial-NoDerivatives 4.0 Internationalcs
dc.rights.accessopenAccesscs
dc.rights.sherpahttp://www.sherpa.ac.uk/romeo/issn/1877-7058/cs
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/cs
dc.subjectNanostructuresen
dc.subjecttin oxideen
dc.subjectfunctionalizationen
dc.subjectAACVDen
dc.subjectgas sensorsen
dc.titleMicromachined Gas Sensors Based on Au-functionalized SnO2 Nanorods Directly Integrated without Catalyst Seeds via AA-CVDen
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
sync.item.dbidVAV-142013en
sync.item.dbtypeVAVen
sync.item.insts2021.12.10 12:52:15en
sync.item.modts2021.12.10 12:14:13en
thesis.grantorVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií. Ústav mikroelektronikycs
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