Micromachined Gas Sensors Based on Au-functionalized SnO2 Nanorods Directly Integrated without Catalyst Seeds via AA-CVD

Tin oxide nanorods functionalized with Au nanoparticles are vapour synthesised at relatively lower temperatures than previously reported and without the need of catalyst seeds using co-deposition method via aerosol-assisted chemical vapour deposition. These functionalized structures formed directly, in a single-step process, on silicon micromachined platforms are tested toward H2, showing 12-fold greater response, 6-fold faster response time and better selectivity to CO compared to a similar non-functionalized system. Results show the significance of these method to form highly gas sensitive nanostructures compatible with the complementary electronic for the fabrication of gas microsensor devices.

Keywords

Nanostructures, tin oxide, functionalization, AACVD, gas sensors

Citation

Procedia Engineering. 2016, vol. 168, issue 1, p. 1078-1081.
https://www.sciencedirect.com/science/article/pii/S187770581633658X

Document type

Peer-reviewed

Document version

Published version

Language of document

en

Document licence

Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International
http://creativecommons.org/licenses/by-nc-nd/4.0/