Local Electron-Sample Interaction During Scanning Electron Microscopy on Organic and Metallic Objects

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but.event.date28.04.2016cs
but.event.titleStudent EEICT 2016cs
dc.contributor.authorKaspar, Pavel
dc.date.accessioned2018-07-10T12:48:22Z
dc.date.available2018-07-10T12:48:22Z
dc.date.issued2016cs
dc.description.abstractTo ascertain how high energy of an electron is needed to acquire a sufficient data yield from organic and metallic sample, a Monte Carlo algorithm is used to compare the behaviour of electrons after contact with the material. Primary electron trajectory, elastic and inelastic scattering and secondary electron generation are described in this paper.en
dc.formattextcs
dc.format.extent738-742cs
dc.format.mimetypeapplication/pdfen
dc.identifier.citationProceedings of the 22nd Conference STUDENT EEICT 2016. s. 738-742. ISBN 978-80-214-5350-0cs
dc.identifier.isbn978-80-214-5350-0
dc.identifier.urihttp://hdl.handle.net/11012/84030
dc.language.isoencs
dc.publisherVysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologiícs
dc.relation.ispartofProceedings of the 22nd Conference STUDENT EEICT 2016en
dc.relation.urihttp://www.feec.vutbr.cz/EEICT/cs
dc.rights© Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologiícs
dc.rights.accessopenAccessen
dc.subjectSEMen
dc.subjectMonte Carloen
dc.subjectElectron scatteringen
dc.subjectSecondary electronen
dc.titleLocal Electron-Sample Interaction During Scanning Electron Microscopy on Organic and Metallic Objectsen
dc.type.driverconferenceObjecten
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
eprints.affiliatedInstitution.departmentFakulta elektrotechniky a komunikačních technologiícs
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