Local Electron-Sample Interaction During Scanning Electron Microscopy on Organic and Metallic Objects
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Date
2016
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Mark
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Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií
Abstract
To ascertain how high energy of an electron is needed to acquire a sufficient data yield from organic and metallic sample, a Monte Carlo algorithm is used to compare the behaviour of electrons after contact with the material. Primary electron trajectory, elastic and inelastic scattering and secondary electron generation are described in this paper.
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Citation
Proceedings of the 22nd Conference STUDENT EEICT 2016. s. 738-742. ISBN 978-80-214-5350-0
http://www.feec.vutbr.cz/EEICT/
http://www.feec.vutbr.cz/EEICT/
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Peer-reviewed
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en
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© Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií