An Experimental and Numerical Study of the Humidity Effect on the Stability of a Capacitive Ceramic Pressure Sensor

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dc.contributor.authorZarnik, Marina Santo
dc.contributor.authorBelavic, Dark
dc.coverage.issue1cs
dc.coverage.volume21cs
dc.date.accessioned2015-01-22T09:23:57Z
dc.date.available2015-01-22T09:23:57Z
dc.date.issued2012-04cs
dc.description.abstractThe effect of the humidity of the surrounding atmosphere on the characteristics of capacitive structures is a known problem for capacitive gas-pressure sensors. However, the use of a differential mode of operation can provide a good solution – only the manufacturing of the ceramic structures with the appropriate pairs of capacitive sensing elements remains a major challenge. In order to find a compromise solution, the effect of the humid atmosphere and the moisture on the exterior of an LTCC-based capacitive pressure sensor was inspected closely through experimental and numerical analyses of various situations.en
dc.formattextcs
dc.format.extent201-206cs
dc.format.mimetypeapplication/pdfen
dc.identifier.citationRadioengineering. 2012, vol. 21, č. 1, s. 201-206. ISSN 1210-2512cs
dc.identifier.issn1210-2512
dc.identifier.urihttp://hdl.handle.net/11012/37030
dc.language.isoencs
dc.publisherSpolečnost pro radioelektronické inženýrstvícs
dc.relation.ispartofRadioengineeringcs
dc.relation.urihttp://www.radioeng.cz/fulltexts/2012/12_01_0201_0206.pdfcs
dc.rightsCreative Commons Attribution 3.0 Unported Licenseen
dc.rights.accessopenAccessen
dc.rights.urihttp://creativecommons.org/licenses/by/3.0/en
dc.subjectCapacitive pressure sensoren
dc.subjectLTCCen
dc.subjectfringe electric fielden
dc.subjectstray capacitancesen
dc.subjectfinite-element analysisen
dc.titleAn Experimental and Numerical Study of the Humidity Effect on the Stability of a Capacitive Ceramic Pressure Sensoren
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
eprints.affiliatedInstitution.facultyFakulta eletrotechniky a komunikačních technologiícs

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