An Experimental and Numerical Study of the Humidity Effect on the Stability of a Capacitive Ceramic Pressure Sensor
dc.contributor.author | Zarnik, Marina Santo | |
dc.contributor.author | Belavic, Dark | |
dc.coverage.issue | 1 | cs |
dc.coverage.volume | 21 | cs |
dc.date.accessioned | 2015-01-22T09:23:57Z | |
dc.date.available | 2015-01-22T09:23:57Z | |
dc.date.issued | 2012-04 | cs |
dc.description.abstract | The effect of the humidity of the surrounding atmosphere on the characteristics of capacitive structures is a known problem for capacitive gas-pressure sensors. However, the use of a differential mode of operation can provide a good solution – only the manufacturing of the ceramic structures with the appropriate pairs of capacitive sensing elements remains a major challenge. In order to find a compromise solution, the effect of the humid atmosphere and the moisture on the exterior of an LTCC-based capacitive pressure sensor was inspected closely through experimental and numerical analyses of various situations. | en |
dc.format | text | cs |
dc.format.extent | 201-206 | cs |
dc.format.mimetype | application/pdf | en |
dc.identifier.citation | Radioengineering. 2012, vol. 21, č. 1, s. 201-206. ISSN 1210-2512 | cs |
dc.identifier.issn | 1210-2512 | |
dc.identifier.uri | http://hdl.handle.net/11012/37030 | |
dc.language.iso | en | cs |
dc.publisher | Společnost pro radioelektronické inženýrství | cs |
dc.relation.ispartof | Radioengineering | cs |
dc.relation.uri | http://www.radioeng.cz/fulltexts/2012/12_01_0201_0206.pdf | cs |
dc.rights | Creative Commons Attribution 3.0 Unported License | en |
dc.rights.access | openAccess | en |
dc.rights.uri | http://creativecommons.org/licenses/by/3.0/ | en |
dc.subject | Capacitive pressure sensor | en |
dc.subject | LTCC | en |
dc.subject | fringe electric field | en |
dc.subject | stray capacitances | en |
dc.subject | finite-element analysis | en |
dc.title | An Experimental and Numerical Study of the Humidity Effect on the Stability of a Capacitive Ceramic Pressure Sensor | en |
dc.type.driver | article | en |
dc.type.status | Peer-reviewed | en |
dc.type.version | publishedVersion | en |
eprints.affiliatedInstitution.faculty | Fakulta eletrotechniky a komunikačních technologií | cs |