ChemFET gas nanosensor arrays with alignment windows for assembly of single nanowires

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dc.contributor.authorChmela, Ondřejcs
dc.contributor.authorGablech, Imrichcs
dc.contributor.authorSadílek, Jakubcs
dc.contributor.authorBrodský, Jancs
dc.contributor.authorVallejos Vargas, Stellacs
dc.coverage.issue4cs
dc.coverage.volume16cs
dc.date.accessioned2024-02-26T09:46:05Z
dc.date.available2024-02-26T09:46:05Z
dc.date.issued2023-04-13cs
dc.description.abstractThis work focuses on the fabrication and characterization of ChemFET (Chemical Field-Effect Transistor) gas nanosensor arrays based on single nanowire (SNW). The fabrication processes include micro and nanofabrication techniques enabled by a combination of ultraviolet (UV) and e-beam lithography to build the ChemFET structure. Results show the integration and connection of SNWs across the multiple pairs of nanoelectrodes in the ChemFET by dielectrophoresis process (DEP) thanks to the incorporation of alignment windows (200-300 nm) adapted to the diameter of the NWs. Measurements of the SNW ChemFET array's output and transfer characteristics prove the influence of gate bias on the drain current regulation. Tests upon hydrogen (H-2) and nitrogen dioxide (NO2) as analyte models of reducing and oxidizing gases show the ChemFET sensing functionality. Moreover, results demonstrate better response characteristics to H-2 when the ChemFET operates in the subthreshold regime. The design concepts and methods proposed for fabricating the SNW-based ChemFET arrays are versatile, reproducible, and most likely adaptable to other systems where SNW arrays are required.en
dc.formattextcs
dc.format.extent10244-110234cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationNANO RES. 2023, vol. 16, issue 4, p. 10244-110234.en
dc.identifier.doi10.1007/s12274-023-5642-xcs
dc.identifier.issn1998-0124cs
dc.identifier.orcid0000-0002-5480-9628cs
dc.identifier.orcid0000-0003-4218-1287cs
dc.identifier.orcid0000-0002-9079-569Xcs
dc.identifier.orcid0000-0002-5656-3158cs
dc.identifier.orcid0000-0002-7415-5414cs
dc.identifier.other183041cs
dc.identifier.researcheridABF-3975-2021cs
dc.identifier.researcheridH-7835-2016cs
dc.identifier.researcheridGYJ-6288-2022cs
dc.identifier.researcheridA-8550-2014cs
dc.identifier.scopus55091127400cs
dc.identifier.scopus57212587388cs
dc.identifier.scopus55934067000cs
dc.identifier.urihttps://hdl.handle.net/11012/245223
dc.language.isoencs
dc.publisherSpringercs
dc.relation.ispartofNANO REScs
dc.relation.urihttps://www.sciopen.com/article/pdf/10.1007/s12274-023-5642-x.pdfcs
dc.rightsCreative Commons Attribution 4.0 Internationalcs
dc.rights.accessopenAccesscs
dc.rights.sherpahttp://www.sherpa.ac.uk/romeo/issn/1998-0124/cs
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/cs
dc.subjectChemFET nanosensorsen
dc.subjectNanowiresen
dc.subjectNanoelectrodesen
dc.subjectGas sensorsen
dc.titleChemFET gas nanosensor arrays with alignment windows for assembly of single nanowiresen
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
sync.item.dbidVAV-183041en
sync.item.dbtypeVAVen
sync.item.insts2024.02.26 10:46:05en
sync.item.modts2024.02.26 10:13:37en
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Chytré nanonástrojecs
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Bioelektronické materiály a systémycs
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Pokročilé polymerní materiály a kompozitcs
thesis.grantorVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií. Ústav mikroelektronikycs
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Ústav mikroelektroniky
Bioelektronické materiály a systémy
Chytré nanonástroje
Pokročilé polymerní materiály a kompozit