Demystifying data evaluation in the measurement of periodic structures

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dc.contributor.authorNečas, Davidcs
dc.contributor.authorYacoot, Andrewcs
dc.contributor.authorValtr, Miroslavcs
dc.contributor.authorKlapetek, Petrcs
dc.coverage.issue5cs
dc.coverage.volume34cs
dc.date.issued2023-05-01cs
dc.description.abstractPeriodic structures are often found in various areas of nanoscience and nanotechnology with many of them being used for metrological purposes either to calibrate instruments, or forming the basis of measuring devices such as encoders. Evaluating the period of one or two-dimensional periodic structures from topography measurements, e.g. performed using scanning probe microscopy, can be achieved using different methodologies with many grating evaluation methods having been proposed in the past and applied to a handful of examples. The optimum methodology for determining the grating period/pitch is not immediately obvious. This paper reports the results of extensive large-scale simulations and analysis to evaluate the performance of both direct and Fourier space data processing methods. Many thousands of simulations have been performed on a variety of different gratings under different measurement conditions and including the simulation of defects encountered in real life situations. The paper concludes with a summary of the merits and disadvantages of the methods together with practical recommendations for the measurements of periodic structures and for developing algorithms for processing them.en
dc.formattextcs
dc.format.extent1-21cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationMeasurement Science and Technology. 2023, vol. 34, issue 5, p. 1-21.en
dc.identifier.doi10.1088/1361-6501/acbab3cs
dc.identifier.issn1361-6501cs
dc.identifier.orcid0000-0001-7731-8453cs
dc.identifier.orcid0000-0002-7628-9184cs
dc.identifier.orcid0000-0001-5241-9178cs
dc.identifier.other183772cs
dc.identifier.researcheridD-7166-2012cs
dc.identifier.researcheridE-3342-2012cs
dc.identifier.researcheridD-6819-2012cs
dc.identifier.urihttp://hdl.handle.net/11012/213690
dc.language.isoencs
dc.publisherIOP Publishingcs
dc.relation.ispartofMeasurement Science and Technologycs
dc.relation.urihttps://iopscience.iop.org/article/10.1088/1361-6501/acbab3cs
dc.rightsCreative Commons Attribution 4.0 Internationalcs
dc.rights.accessopenAccesscs
dc.rights.sherpahttp://www.sherpa.ac.uk/romeo/issn/1361-6501/cs
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/cs
dc.subjectscanning probe microscopyen
dc.subjectdata processingen
dc.subjecttraceabilityen
dc.subjectgrating pitchen
dc.subjectnanometrologyen
dc.subjectuncertaintyen
dc.titleDemystifying data evaluation in the measurement of periodic structuresen
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
sync.item.dbidVAV-183772en
sync.item.dbtypeVAVen
sync.item.insts2025.02.03 15:50:56en
sync.item.modts2025.01.17 18:39:57en
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Vývoj metod analýzy a měřenícs
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Plazmové technologie pro materiálycs
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