Design and Fabrication of Birdcage Resonators for Low-pressure Plasma Excitation
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Date
2023-04
Authors
Jurik, K.
Stary, J.
Drexler, P.
ORCID
Advisor
Referee
Mark
Journal Title
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Volume Title
Publisher
Společnost pro radioelektronické inženýrství
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Abstract
This paper presents a design, analysis and optimization of birdcage resonators employed in a novel radiofrequency plasma source. Three resonators were simulated and fabricated. The resonators differ in their design and in the different materials of used dielectric – polyimide and polytetrafluorethylene (PTFE). The resonance frequency of fabricated samples possesses a maximal error of 2.2 % compared to the simulated values. The performance in plasma excitation is related to the electrical parameters, while the best performing resonator (PTFE-based) exhibits the maximum real impedance of 644.3 Ω at the resonance frequency and the 799.5 V/m electric field strength. This resonator shows the best power efficiency in a plasma ignition experiment. The resonator ignited the discharge at ca. 1 Pa of ambient air atmosphere with only 0.34 W of input radiofrequency power.
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Citation
Radioengineering. 2023 vol. 32, č. 1, s. 44-50. ISSN 1210-2512
https://www.radioeng.cz/fulltexts/2023/23_01_0044_0050.pdf
https://www.radioeng.cz/fulltexts/2023/23_01_0044_0050.pdf
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Peer-reviewed
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Language of document
en