Stereometric analysis of Ta2O5 thin lms

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dc.contributor.authorSobola, Dinaracs
dc.contributor.authorKaspar, Pavelcs
dc.contributor.authorOulehla, Jindřichcs
dc.contributor.authorŢălu, Ştefancs
dc.contributor.authorPapež, Nikolacs
dc.coverage.issue1cs
dc.coverage.volume1cs
dc.date.issued2020-01-27cs
dc.description.abstractThe purpose of this work is the study of the correlation between the thickness of tantalum pentoxide thin lms and their three-dimensional (3D) micromorphology.The samples were prepared on silicon substrates by electron beam evaporation. The differences in surface structure of the processed and references samples were investigated. Compositional studies were performed by energy-dispersiveX-rayspectroscopy. Stereometric analysis was carried out on the basis of atomic force microscopy(AFM) data, for antalum pentoxide samples with 20nm, 40nm,60nm, 80nm and 100nm thicknesses. These methods are frequently used in describing experimental data of surface nanomorphology of Ta2O5. The results can be used to validate theoretical models for prediction or correlation of nanotexture surface parameters.en
dc.formattextcs
dc.format.extent1-10cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationMATERIALS SCIENCE-POLAND. 2020, vol. 1, issue 1, p. 1-10.en
dc.identifier.doi10.2478/msp-2019-0083cs
dc.identifier.issn2083-134Xcs
dc.identifier.orcid0000-0002-0008-5265cs
dc.identifier.orcid0000-0003-1757-2382cs
dc.identifier.orcid0000-0003-2297-2890cs
dc.identifier.other161606cs
dc.identifier.researcheridG-1175-2019cs
dc.identifier.researcheridH-1293-2014cs
dc.identifier.researcheridY-9823-2019cs
dc.identifier.scopus57189064262cs
dc.identifier.scopus56516508200cs
dc.identifier.scopus57195963424cs
dc.identifier.urihttp://hdl.handle.net/11012/193376
dc.language.isoencs
dc.publisherDe Gruytercs
dc.relation.ispartofMATERIALS SCIENCE-POLANDcs
dc.relation.urihttps://content.sciendo.com/view/journals/msp/ahead-of-print/article-10.2478-msp-2019-0083.xmlcs
dc.rightsCreative Commons Attribution-NonCommercial-NoDerivatives 4.0 Internationalcs
dc.rights.accessopenAccesscs
dc.rights.sherpahttp://www.sherpa.ac.uk/romeo/issn/2083-134X/cs
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/cs
dc.subjectatomic force microscopy; stereometric analysis; Ta2O5en
dc.subjecttopographen
dc.titleStereometric analysis of Ta2O5 thin lmsen
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
sync.item.dbidVAV-161606en
sync.item.dbtypeVAVen
sync.item.insts2024.02.26 07:45:42en
sync.item.modts2024.02.26 07:13:14en
thesis.grantorVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií. Ústav fyzikycs
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Pokročilé keramické materiálycs
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Pokročilé keramické materiály