Stereometric analysis of Ta2O5 thin lms

Abstract

The purpose of this work is the study of the correlation between the thickness of tantalum pentoxide thin lms and their three-dimensional (3D) micromorphology.The samples were prepared on silicon substrates by electron beam evaporation. The differences in surface structure of the processed and references samples were investigated. Compositional studies were performed by energy-dispersiveX-rayspectroscopy. Stereometric analysis was carried out on the basis of atomic force microscopy(AFM) data, for antalum pentoxide samples with 20nm, 40nm,60nm, 80nm and 100nm thicknesses. These methods are frequently used in describing experimental data of surface nanomorphology of Ta2O5. The results can be used to validate theoretical models for prediction or correlation of nanotexture surface parameters.The purpose of this work is the study of the correlation between the thickness of tantalum pentoxide thin lms and their three-dimensional (3D) micromorphology.The samples were prepared on silicon substrates by electron beam evaporation. The differences in surface structure of the processed and references samples were investigated. Compositional studies were performed by energy-dispersiveX-rayspectroscopy. Stereometric analysis was carried out on the basis of atomic force microscopy(AFM) data, for antalum pentoxide samples with 20nm, 40nm,60nm, 80nm and 100nm thicknesses. These methods are frequently used in describing experimental data of surface nanomorphology of Ta2O5. The results can be used to validate theoretical models for prediction or correlation of nanotexture surface parameters.