The Impact of Nozzle Opening Thickness on Flow Characteristics and Primary Electron Beam Scattering in an Environmental Scanning Electron Microscope

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dc.contributor.authorMaxa, Jiřícs
dc.contributor.authorŠabacká, Pavlacs
dc.contributor.authorJan, Mazalcs
dc.contributor.authorNeděla, Vilémcs
dc.contributor.authorBinar, Tomášcs
dc.contributor.authorBača, Petrcs
dc.contributor.authorTalár, Jaroslavcs
dc.contributor.authorBayer, Robertcs
dc.contributor.authorČudek, Pavelcs
dc.coverage.issue7cs
dc.coverage.volume24cs
dc.date.issued2024-03-28cs
dc.description.abstractThis paper describes the methodology of combining experimental measurements with mathematical–physics analyses in the investigation of flow in the aperture and nozzle. The aperture and nozzle separate the differentially pumped chamber from the specimen chamber in an environmental scanning electron microscope (ESEM). Experimental measurements are provided by temperature and pressure sensors that meet the demanding conditions of cryogenic temperature zones and low pressures. This aperture maintains the required pressure difference between the chambers. Since it separates the large pressure gradient, critical flow occurs on it and supersonic gas flow with the characteristic properties of critical flow in the state variables occurs behind it. As a primary electron beam passes through the differential pumped chamber and the given aperture, the aperture is equipped with a nozzle. The shape of the nozzle strongly influences the character of the supersonic flow. The course of state variables is also strongly influenced by this shape; thus, it affects the number of collisions the primary beam’s electrons have with gas molecules, and so the resulting image. This paper describes experimental measurements made using sensors under laboratory conditions in a specially created experimental chamber. Then, validation using mathematical–physical analysis in the Ansys Fluent system is described.en
dc.formattextcs
dc.format.extent1-27cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationSENSORS. 2024, vol. 24, issue 7, p. 1-27.en
dc.identifier.doi10.3390/s24072166cs
dc.identifier.issn1424-8220cs
dc.identifier.orcid0000-0002-0640-0406cs
dc.identifier.orcid0000-0003-3908-5120cs
dc.identifier.orcid0000-0003-4426-2857cs
dc.identifier.orcid0000-0001-9793-9767cs
dc.identifier.orcid0000-0002-8528-4430cs
dc.identifier.orcid0000-0003-2939-582Xcs
dc.identifier.other188334cs
dc.identifier.researcheridH-7547-2018cs
dc.identifier.researcheridO-6693-2017cs
dc.identifier.scopus43661524200cs
dc.identifier.scopus57095076700cs
dc.identifier.scopus54079251600cs
dc.identifier.scopus7004123643cs
dc.identifier.scopus57194409742cs
dc.identifier.scopus55775519600cs
dc.identifier.urihttp://hdl.handle.net/11012/245520
dc.language.isoencs
dc.publisherMDPIcs
dc.relation.ispartofSENSORScs
dc.relation.urihttps://www.mdpi.com/1424-8220/24/7/2166cs
dc.rightsCreative Commons Attribution 4.0 Internationalcs
dc.rights.accessopenAccesscs
dc.rights.sherpahttp://www.sherpa.ac.uk/romeo/issn/1424-8220/cs
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/cs
dc.subjectAnsys Fluenten
dc.subjectESEMen
dc.subjectcritical flowen
dc.subjectnozzleen
dc.subjectCFDen
dc.subjectnumerical simulationen
dc.titleThe Impact of Nozzle Opening Thickness on Flow Characteristics and Primary Electron Beam Scattering in an Environmental Scanning Electron Microscopeen
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
sync.item.dbidVAV-188334en
sync.item.dbtypeVAVen
sync.item.insts2024.05.26 22:46:12en
sync.item.modts2024.05.26 22:13:54en
thesis.grantorVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií. Ústav elektrotechnologiecs
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