Kurz přípravy MEMS – mikro elektro mechanických součástek
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Eliáš, Marek
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VUT v Brně
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This course aims to provide an overview of the basic theoretical knowledge in dry etching, which is used to create Micro-Electro-Mechanical Systems (MEMS ). You will learn about the principles of etching, basic terminology, types of plasmas used for etching, differences between dry and wet etching, etc.
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cs
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