Analysis of Whirling of Gas Flow within the Specimen Chamber of ESEM
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Authors
Bayer, Robert
Advisor
Referee
Mark
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Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií
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Abstract
The usage of an Environmental scanning electron microscope (ESEM) brings the possibility of studying many kinds of materials and chemical reactions never studied before. In this article there are compared and analyzed several simulation results of gas flow in the specimen chamber of ESEM with high gas pressure throughout the whole volume except on its optical axis, where low gas pressure is needed.
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Citation
Proceedings of the 22nd Conference STUDENT EEICT 2016. s. 595-599. ISBN 978-80-214-5350-0
http://www.feec.vutbr.cz/EEICT/
http://www.feec.vutbr.cz/EEICT/
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Peer-reviewed
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en