Mathematical Physics Analysis of Nozzle Shaping at the Gas Outlet from the Aperture to the Differentially Pumped Chamber in Environmental Scanning Electron Microscopy (ESEM)

Simple item page
dc.contributor.authorMaxa, Jiřícs
dc.contributor.authorNeděla, Vilémcs
dc.contributor.authorŠabacká, Pavlacs
dc.contributor.authorBinar, Tomášcs
dc.coverage.issue10cs
dc.coverage.volume24cs
dc.date.accessioned2024-07-23T14:45:53Z
dc.date.available2024-07-23T14:45:53Z
dc.date.issued2024-05-20cs
dc.description.abstractA combination of experimental measurement preparations using pressure and temperature sensors in conjunction with the theory of one-dimensional isentropic flow and mathematical physics analyses is presented as a tool for analysis in this paper. Furthermore, the subsequent development of a nozzle for use in environmental electron microscopy between the specimen chamber and the differentially pumped chamber is described. Based on experimental measurements, an analysis of the impact of the nozzle shaping located behind the aperture on the character of the supersonic flow and the resulting dispersion of the electron beam passing through the differential pumped chamber is carried out on the determined pressure ratio using a combination of theory and mathematical physics analyses. The results show that nozzle shapes causing under-expanded gas outflow from the aperture to the nozzle have a worse impact on the dispersion of the primary electron beam. This is due to the flow velocity control. The controlled reduction in the static pressure curve on the primary electron beam path thus causes a significantly higher course of electron dispersion values than variants with shapes causing over-expanded gas outflow.en
dc.formattextcs
dc.format.extent1-26cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationSENSORS. 2024, vol. 24, issue 10, p. 1-26.en
dc.identifier.doi10.3390/s24103243cs
dc.identifier.issn1424-8220cs
dc.identifier.orcid0000-0002-0640-0406cs
dc.identifier.orcid0000-0003-3908-5120cs
dc.identifier.orcid0000-0003-4426-2857cs
dc.identifier.other188712cs
dc.identifier.scopus43661524200cs
dc.identifier.scopus57095076700cs
dc.identifier.scopus54079251600cs
dc.identifier.urihttps://hdl.handle.net/11012/249358
dc.language.isoencs
dc.publisherMDPIcs
dc.relation.ispartofSENSORScs
dc.relation.urihttps://www.mdpi.com/1424-8220/24/10/3243cs
dc.rightsCreative Commons Attribution 4.0 Internationalcs
dc.rights.accessopenAccesscs
dc.rights.sherpahttp://www.sherpa.ac.uk/romeo/issn/1424-8220/cs
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/cs
dc.subjectAnsys Fluenten
dc.subjectESEMen
dc.subjectcritical flowen
dc.subjectnozzleen
dc.subjectCFDen
dc.subjectnumerical simulationen
dc.titleMathematical Physics Analysis of Nozzle Shaping at the Gas Outlet from the Aperture to the Differentially Pumped Chamber in Environmental Scanning Electron Microscopy (ESEM)en
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
sync.item.dbidVAV-188712en
sync.item.dbtypeVAVen
sync.item.insts2024.07.23 16:45:53en
sync.item.modts2024.07.23 16:13:28en
thesis.grantorVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií. Ústav elektrotechnologiecs
Files
Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
sensors2403243.pdf
Size:
8.01 MB
Format:
Adobe Portable Document Format
Description:
file sensors2403243.pdf
Download
Collections
Ústav elektrotechnologie