Multiple-fibre interferometry setup for probe sample interaction measurements in atomic force microscopy

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dc.contributor.authorKlapetek, Petrcs
dc.contributor.authorYacoot, Andrewcs
dc.contributor.authorHortvík, Václavcs
dc.contributor.authorDuchoň, Václavcs
dc.contributor.authorDongmo, Hervecs
dc.contributor.authorŘeřucha, Šimoncs
dc.contributor.authorValtr, Miroslavcs
dc.contributor.authorNečas, Davidcs
dc.coverage.issue9cs
dc.coverage.volume31cs
dc.date.accessioned2021-04-20T06:55:00Z
dc.date.available2021-04-20T06:55:00Z
dc.date.issued2020-09-01cs
dc.description.abstractAtomic force microscopy (AFM) often relies on the assumption that cantilever bending can be described by simple beam theory and that the displacement of the tip can be evaluated from the cantilever angle. Some more advanced metrological instruments use free-space or fibre interferometers for measuring the position of the cantilever apex directly, thereby simplifying the metrology traceability chain. The next logical development, covering measurements of both the cantilever apex position and its deformation due to lateral forces acting during different AFM measurement regimes, is presented in this paper. It is based on using a set of closely packed fibre interferometers that can be used to determine localised bending of the cantilever at different positions along the cantilever. This can be used for detection of cantilever deformation beyond classical beam theory, and can yield both better understanding of sources of uncertainty in individual AFM force-distance measurements and more accurate scanning in constant height mode in high-speed AFM applications.en
dc.formattextcs
dc.format.extent1-11cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationMeasurement Science and Technology. 2020, vol. 31, issue 9, p. 1-11.en
dc.identifier.doi10.1088/1361-6501/ab85d8cs
dc.identifier.issn0957-0233cs
dc.identifier.other169073cs
dc.identifier.urihttp://hdl.handle.net/11012/196528
dc.language.isoencs
dc.publisherIOP Publishingcs
dc.relation.ispartofMeasurement Science and Technologycs
dc.relation.urihttps://iopscience.iop.org/article/10.1088/1361-6501/ab85d8cs
dc.rightsCreative Commons Attribution 4.0 Internationalcs
dc.rights.accessopenAccesscs
dc.rights.sherpahttp://www.sherpa.ac.uk/romeo/issn/0957-0233/cs
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/cs
dc.subjectatomic force microscopyen
dc.subjectinterferometryen
dc.subjectmetrologyen
dc.titleMultiple-fibre interferometry setup for probe sample interaction measurements in atomic force microscopyen
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
sync.item.dbidVAV-169073en
sync.item.dbtypeVAVen
sync.item.insts2021.04.20 08:55:00en
sync.item.modts2021.04.20 08:14:25en
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Vývoj metod analýzy a měřenícs
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