System for MEMS Gyroscope Testing

Abstract

This paper presents fundamental information about an apparatus for tests on MEMS gyroscopes. Within the introductory section, the measurement system used to test MEMS gyroscopes at a Honeywell laboratory is characterized; the set-up comprises a Polytec MSA-500 analyzer, goniometers, and a controller. The related practical part then describes an application developed with the LabVIEW software to control the position of the goniometers. Importantly, the discussed system is able to fully control two goniometer stages and to align the MEMS device surface into an orthogonal position with respect to the Polytec MSA-500 measurement unit.