Impact of Supersonic Flow in Scintillator Detector Apertures on the Resulting Pumping Effect of the Vacuum Chambers

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dc.contributor.authorMaxa, Jiřícs
dc.contributor.authorNeděla, Vilémcs
dc.contributor.authorŠabacká, Pavlacs
dc.contributor.authorBinar, Tomášcs
dc.coverage.issue10cs
dc.coverage.volume23cs
dc.date.issued2023-05-18cs
dc.description.abstractThe article describes the combination of experimental measurements with mathematical–physics analyses in flow investigation in the chambers of the scintillator detector, which is a part of the environmental scanning electron microscope. The chambers are divided with apertures by small openings that keep the desirable pressure differences between three chambers: The specimen chamber, the differentially pumped intermediate chamber, and the scintillator chamber. There are conflicting demands on these apertures. On the one hand, the diameter of the apertures must be as big as possible so that they incur minimal losses of the passing secondary electrons. On the other hand, it is possible to magnify the apertures only to a certain extent so the rotary and turbomolecular vacuum pump can maintain the required operating pressures in separate chambers. The article describes the combination of experimental measurement using an absolute pressure sensor and mathematical physics analysis to map all the specifics of the emerging critical supersonic flow in apertures between the chambers. Based on the experiments and their tuned analyses, the most effective variant of combining the sizes of each aperture concerning different operating pressures in the detector is determined. The situation is made more difficult by the described fact that each aperture separates a different pressure gradient, so the gas flow through each aperture has its own characteristics with a different type of critical flow, and they influence each other, thereby influencing the final passage of secondary electrons detected by the scintillator and thus affecting the resulting displayed image.en
dc.formattextcs
dc.format.extent1-38cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationSENSORS. 2023, vol. 23, issue 10, p. 1-38.en
dc.identifier.doi10.3390/s23104861cs
dc.identifier.issn1424-8220cs
dc.identifier.orcid0000-0002-0640-0406cs
dc.identifier.orcid0000-0003-3908-5120cs
dc.identifier.orcid0000-0003-4426-2857cs
dc.identifier.other183736cs
dc.identifier.scopus43661524200cs
dc.identifier.scopus57095076700cs
dc.identifier.scopus54079251600cs
dc.identifier.urihttp://hdl.handle.net/11012/244944
dc.language.isoencs
dc.publisherMDPIcs
dc.relation.ispartofSENSORScs
dc.relation.urihttps://www.mdpi.com/1424-8220/23/10/4861cs
dc.rightsCreative Commons Attribution 4.0 Internationalcs
dc.rights.accessopenAccesscs
dc.rights.sherpahttp://www.sherpa.ac.uk/romeo/issn/1424-8220/cs
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/cs
dc.subjectAnsys Fluenten
dc.subjectESEMen
dc.subjectscintillation detectoren
dc.subjectcritical flowen
dc.subjectone-dimensional flow theoryen
dc.subjectapertureen
dc.subjectpressure sensoren
dc.titleImpact of Supersonic Flow in Scintillator Detector Apertures on the Resulting Pumping Effect of the Vacuum Chambersen
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
sync.item.dbidVAV-183736en
sync.item.dbtypeVAVen
sync.item.insts2025.02.03 15:40:19en
sync.item.modts2025.01.17 16:53:22en
thesis.grantorVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií. Ústav elektrotechnologiecs
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