Nonlinear Performance of BAW Filters Including BST Capacitors

Abstract

This paper evaluates the nonlinear effects occurring in a bulk acoustic wave (BAW) filter which includes barium strontium titanate (BST) capacitors to cancel the electrostatic capacitance of the BAW resonators. To do that we consider the nonlinear effects on the BAW resonators by use of a nonlinear Mason model. This model accounts for the distributed nonlinearities inherent in the materials forming the resonator. The whole filter is then implemented by properly connecting the resonators in a balanced configuration. Additional BST capacitors are included in the filter topology. The nonlinear behavior of the BST capacitors is also accounted in the overall nonlinear assessment. The whole circuit is then used to evaluate its nonlinear behavior. It is found that the nonlinear contribution arising from the ferroelectric nature of the BST capacitors makes it impractical to fulfill the linearity requirements of commercial filters.