Comparison of Results Optained Using Monte Carlo and Ansys Fluent in Analysis Differentially Pumped Chamber

Abstract

The goal of this thesis is the analysis of a gas flow running through the drain channels within the apertures of differentially pumped chamber of the Environmental Scanning Electron Microscope (ESEM). This thesis contains a verification of current simulation results of gas flow within the differentially pumped chamber published by D. Danilatos using Monte Carlo method in comparison with simulation results achieved by using simulation program ANSYS Fluent, which uses the mechanism of continuum for its calculations.