Determination of Optical and Structural Parameters of Thin Films with Differently Rough Boundaries

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dc.contributor.authorOhlídal, Ivancs
dc.contributor.authorVohánka, Jířícs
dc.contributor.authorDvořák, Jancs
dc.contributor.authorBuršíková, Vilmacs
dc.contributor.authorKlapetek, Petrcs
dc.coverage.issue11cs
dc.coverage.volume14cs
dc.date.accessioned2025-06-12T08:57:24Z
dc.date.available2025-06-12T08:57:24Z
dc.date.issued2024-11-12cs
dc.description.abstractThe optical characterization of non-absorbing, homogeneous, isotropic polymer-like thin films with correlated, differently rough boundaries is essential in optimizing their performance in various applications. A central aim of this study is to derive the general formulae necessary for the characterization of such films. The applicability of this theory is illustrated through the characterization of a polymer-like thin film deposited by plasma-enhanced chemical vapor deposition onto a silicon substrate with a randomly rough surface, focusing on the analysis of its rough boundaries over a wide range of spatial frequencies. The method is based on processing experimental data obtained using variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. The transition layer is considered at the lower boundary of the polymer-like thin film. The spectral dependencies of the optical constants of the polymer-like thin film and the transition layer are determined using the Campi-Coriasso dispersion model. The reflectance data are processed using a combination of Rayleigh-Rice theory and scalar diffraction theory in the near-infrared and visible spectral ranges, while scalar diffraction theory is used for the processing of reflectance data within the ultraviolet range. Rayleigh-Rice theory alone is sufficient for the processing of the ellipsometric data across the entire spectral range. We accurately determine the thicknesses of the polymer-like thin film and the transition layer, as well as the roughness parameters of both boundaries, with the root mean square (rms) values cross-validated using atomic force microscopy. Notably, the rms values derived from optical measurements and atomic force microscopy show excellent agreement. These findings confirm the reliability of the optical method for the detailed characterization of thin films with differently rough boundaries, supporting the applicability of the proposed method in high-precision film analysis.en
dc.formattextcs
dc.format.extent20cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationCoatings, MDPI. 2024, vol. 14, issue 11, 20 p.en
dc.identifier.doi10.3390/coatings14111439cs
dc.identifier.issn2079-6412cs
dc.identifier.orcid0000-0001-5241-9178cs
dc.identifier.other193409cs
dc.identifier.researcheridD-6819-2012cs
dc.identifier.urihttps://hdl.handle.net/11012/252163
dc.language.isoencs
dc.publisherMDPIcs
dc.relation.ispartofCoatings, MDPIcs
dc.relation.urihttps://www.mdpi.com/2079-6412/14/11/1439cs
dc.rightsCreative Commons Attribution 4.0 Internationalcs
dc.rights.accessopenAccesscs
dc.rights.sherpahttp://www.sherpa.ac.uk/romeo/issn/2079-6412/cs
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/cs
dc.subjectellipsometryen
dc.subjectreflectometryen
dc.subjectthin filmsen
dc.subjectroughnessen
dc.subjectoptical characterizationen
dc.titleDetermination of Optical and Structural Parameters of Thin Films with Differently Rough Boundariesen
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
sync.item.dbidVAV-193409en
sync.item.dbtypeVAVen
sync.item.insts2025.06.12 10:57:24en
sync.item.modts2025.06.12 10:33:27en
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Vývoj metod analýzy a měřenícs
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