How levelling and scan line corrections ruin roughness measurement and how to prevent it

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dc.contributor.authorNečas, Davidcs
dc.contributor.authorValtr, Miroslavcs
dc.contributor.authorKlapetek, Petrcs
dc.coverage.issue1cs
dc.coverage.volume10cs
dc.date.accessioned2021-04-19T14:54:53Z
dc.date.available2021-04-19T14:54:53Z
dc.date.issued2020-09-17cs
dc.description.abstractSurface roughness plays an important role in various fields of nanoscience and nanotechnology. However, the present practices in roughness measurements, typically based on some Atomic Force Microscopy measurements for nanometric roughness or optical or mechanical profilometry for larger scale roughness significantly bias the results. Such biased values are present in nearly all the papers dealing with surface parameters, in the areas of nanotechnology, thin films or material science. Surface roughness, most typically root mean square value of irregularities Sq is often used parameter that is used to control the technologies or to link the surface properties with other material functionality. The error in estimated values depends on the ratio between scan size and roughness correlation length and on the way how the data are processed and can easily be larger than 10% without us noting anything suspicious. Here we present a survey of how large is the problem, detailed analysis of its nature and suggest methods to predict the error in roughness measurements and possibly to correct them. We also present a guidance for choosing suitable scan area during the measurement.en
dc.formattextcs
dc.format.extent1-15cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationScientific Reports. 2020, vol. 10, issue 1, p. 1-15.en
dc.identifier.doi10.1038/s41598-020-72171-8cs
dc.identifier.issn2045-2322cs
dc.identifier.other169070cs
dc.identifier.urihttp://hdl.handle.net/11012/196523
dc.language.isoencs
dc.publisherSpringer Naturecs
dc.relation.ispartofScientific Reportscs
dc.relation.urihttps://www.nature.com/articles/s41598-020-72171-8cs
dc.rightsCreative Commons Attribution 4.0 Internationalcs
dc.rights.accessopenAccesscs
dc.rights.sherpahttp://www.sherpa.ac.uk/romeo/issn/2045-2322/cs
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/cs
dc.subjectSIMULATIONen
dc.subjectSURFACESen
dc.titleHow levelling and scan line corrections ruin roughness measurement and how to prevent iten
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
sync.item.dbidVAV-169070en
sync.item.dbtypeVAVen
sync.item.insts2021.04.19 16:54:53en
sync.item.modts2021.04.19 16:14:23en
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Vývoj metod analýzy a měřenícs
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