Transparent and conductive titanium nitride thin films for implantable bioelectronics deposited at low temperature using two Kaufman ion-beam sources

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but.event.date26.04.2022cs
but.event.titleSTUDENT EEICT 2022cs
dc.contributor.authorJarušek, J.
dc.contributor.authorGablech, I.
dc.date.accessioned2023-04-25T10:17:06Z
dc.date.available2023-04-25T10:17:06Z
dc.date.issued2022cs
dc.description.abstractThis work proposes ultra-thin films of titanium nitride as a material for the realization of transparent and conductive layers suitable for implantable bioelectronics. Results further show that good results of crystallography, transmittance, and sheet resistance can be achieved for thin films with thicknesses of 15 nm and 20 nm deposited at the beam energy of the primary ion source of 400 eV and temperature below 100 °C.en
dc.formattextcs
dc.format.extent84-87cs
dc.format.mimetypeapplication/pdfen
dc.identifier.citationProceedings I of the 28st Conference STUDENT EEICT 2022: General papers. s. 84-87. ISBN 978-80-214-6029-4cs
dc.identifier.isbn978-80-214-6029-4
dc.identifier.urihttp://hdl.handle.net/11012/209297
dc.language.isoencs
dc.publisherVysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologiícs
dc.relation.ispartofProceedings I of the 28st Conference STUDENT EEICT 2022: General papersen
dc.relation.urihttps://conf.feec.vutbr.cz/eeict/index/pages/view/ke_stazenics
dc.rights© Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologiícs
dc.rights.accessopenAccessen
dc.subjecttitanium nitrideen
dc.subjecttransparent conducting filmen
dc.subjectsputteringen
dc.subjectbioelectronics implantsen
dc.subjectthin filmsen
dc.subjectvisible transmittanceen
dc.titleTransparent and conductive titanium nitride thin films for implantable bioelectronics deposited at low temperature using two Kaufman ion-beam sourcesen
dc.type.driverconferenceObjecten
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
eprints.affiliatedInstitution.departmentFakulta elektrotechniky a komunikačních technologiícs
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