Multi-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theory

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dc.contributor.authorŠulc, Václavcs
dc.contributor.authorVohánka, Jířícs
dc.contributor.authorOhlídal, Ivancs
dc.contributor.authorKlapetek, Petrcs
dc.contributor.authorOhlídal, Miloslavcs
dc.contributor.authorKaur, Nupinder Jeetcs
dc.contributor.authorVižďa, Františekcs
dc.coverage.issue11cs
dc.coverage.volume13cs
dc.date.accessioned2024-02-20T10:45:50Z
dc.date.available2024-02-20T10:45:50Z
dc.date.issued2023-10-27cs
dc.description.abstractAngle-resolved scattering was measured for four samples of silicon exhibiting different surface roughnesses. The measurements were performed for three wavelengths: 457.9 nm, 514.5 nm, and 647.1 nm. Three approaches were used to evaluate the experimental data. The first approach corresponds to the exact formula derived using the scalar diffraction theory. This formula is quite complicated, and numerical methods must be used for its evaluation. For this reason, another two approaches representing approximations by much simpler formulae were considered. The use of several wavelengths allowed us not only to recover the power spectral density function in a limited interval of spatial frequencies but also to determine the total rms values of the heights, which represent the quantity of roughness for all spatial frequencies. The possibility of recovering the total rms values of the heights using the multi-wavelength approach is the most important result of this work. The results obtained from the scattering experiment and atomic force microscopy are compared.en
dc.formattextcs
dc.format.extent15cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationCoatings, MDPI. 2023, vol. 13, issue 11, 15 p.en
dc.identifier.doi10.3390/coatings13111853cs
dc.identifier.issn2079-6412cs
dc.identifier.orcid0000-0002-4313-2375cs
dc.identifier.orcid0000-0001-5241-9178cs
dc.identifier.orcid0000-0002-4207-3641cs
dc.identifier.orcid0000-0003-4146-826Xcs
dc.identifier.other187201cs
dc.identifier.researcheridD-6819-2012cs
dc.identifier.researcheridDJQ-0305-2022cs
dc.identifier.scopus6701513140cs
dc.identifier.urihttps://hdl.handle.net/11012/245087
dc.language.isoencs
dc.publisherMDPIcs
dc.relation.ispartofCoatings, MDPIcs
dc.relation.urihttps://www.mdpi.com/2079-6412/13/11/1853cs
dc.rightsCreative Commons Attribution 4.0 Internationalcs
dc.rights.accessopenAccesscs
dc.rights.sherpahttp://www.sherpa.ac.uk/romeo/issn/2079-6412/cs
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/cs
dc.subjectroughnessen
dc.subjectscalar diffraction theoryen
dc.subjectangle-resolved scatteringen
dc.titleMulti-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theoryen
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
sync.item.dbidVAV-187201en
sync.item.dbtypeVAVen
sync.item.insts2024.02.20 11:45:50en
sync.item.modts2024.02.20 11:13:03en
thesis.grantorVysoké učení technické v Brně. Fakulta strojního inženýrství. Ústav fyzikálního inženýrstvícs
thesis.grantorVysoké učení technické v Brně. Středoevropský technologický institut VUT. Vývoj metod analýzy a měřenícs
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