In-Situ Sem Characterization Of Lithium-Ion Battery Created On Mems Chip

Abstract

The aim of the work is to develop an in-situ method for electrode nanostructure investigationby scanning electron microscopy. In the first part, the preparation of a model battery using FIBSEMsystem is described, which consists of lithium titanate oxide (LTO) and metallic lithium materialcutting by the focused ion beam, transport to the MEMS chip, and contacting by carbon deposition.After that the electrodes were soaked by the electrolyte, the voltage changes were measured ontwo created battery systems. Finally, a current was applied to the cell. However, cycling failed dueto technological problems. Challenges connected with battery preparation are described and possiblesolutions for future testing are proposed. The work is evolved in cooperation with Thermo FisherScientific Brno.