Optimization of Fabrication Parameters for Atomic Force Microscopy Probes to Improve Image Resolution and Analysis

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Misiurev, Denis
Vladimír, Holcman

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Mark

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Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií

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This study is part of a broader initiative to develop a comprehensive metric system for optimizing the fabrication of ultra-sharp Atomic Force Microscopy (AFM) probe tips. The system integrates data from multiple characterization techniques, including Focused Ion Beam (FIB) milling and Scanning Electron Microscopy (SEM) for morphological analysis, and Raman spectroscopy for assessing material composition. Detailed topographical and scanning data from AFM further inform the metric framework. Additionally, advanced simulations are conducted to model the distribution of the electric field between the sharp probe tip and the scanned surface. Electron behavior at the nanoscale interface is investigated using Monte Carlo and Molecular Dynamics simulations, providing insight into tip –surface interactions. Statistical and computational analyses are applied to identify correlations among fabrication parameters and performance indicators. This multifaceted approach aims to uncover the fundamental physical principles governing probe behavior, ultimately enhancing the precision, efficiency, and reproducibility of AFM probe fabrication for applications in nanotechnology and surface science.

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Proceedings I of the 31st Conference STUDENT EEICT 2025: General papers. s. 285-290. ISBN 978-80-214-6321-9
https://www.eeict.cz/eeict_download/archiv/sborniky/EEICT_2025_sbornik_1.pdf

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Peer-reviewed

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en

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