Silicon Solar Cell Parameters Change After Focused Ion Beam Milling

Abstract

Silicon is still one of the most used materials for fabrication of solar cells. Some imperfections and defects may appear during production process. These local imperfections could be eliminated by focused ion beam (FIB). Nevertheless, FIB milling process modifies the crystal structure of the material by ions implantation. Samples under investigation are monocrystalline silicon solar cells. The impact of FIB milling is shown and discussed through current-voltage measurement before and after milling process.