Comparison of Dry and Wet Oxidation Process during Low Pressure Boron Diffusion with BBR3 in Solar Cell Production

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but.event.date23.04.2015cs
but.event.titleStudent EEICT 2015cs
dc.contributor.authorMojrová, B.
dc.date.accessioned2015-08-25T08:43:03Z
dc.date.available2015-08-25T08:43:03Z
dc.date.issued2015cs
dc.description.abstractThis paper deals with replacing a dry oxidation with a wet oxidation process during low pressure diffusion using boron tribromide (BBr3) in solar cell production. Because the liquid boron trioxide (B2O3), a product of a chemical reaction during diffusion, condenses apart from wafers on walls of quartz tube, it is essential to clean the tube after diffusion. This could be done by evaporation of water into the tube after unload or, in order to make the production time shorter, by replacing the dry oxidation with wet oxidation process. In this paper a comparison of the wet and dry oxidation is given with regard to the solar cell production.en
dc.formattextcs
dc.format.extent376-380cs
dc.format.mimetypeapplication/pdfen
dc.identifier.citationProceedings of the 21st Conference STUDENT EEICT 2015. s. 376-380. ISBN 978-80-214-5148-3cs
dc.identifier.isbn978-80-214-5148-3
dc.identifier.urihttp://hdl.handle.net/11012/43027
dc.language.isoencs
dc.publisherVysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologiícs
dc.relation.ispartofProceedings of the 21st Conference STUDENT EEICT 2015en
dc.relation.urihttp://www.feec.vutbr.cz/EEICT/cs
dc.rights© Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologiícs
dc.rights.accessopenAccessen
dc.subjectBBr3en
dc.subjectdiffusionen
dc.subjectsolar cellen
dc.subjectoxidationen
dc.titleComparison of Dry and Wet Oxidation Process during Low Pressure Boron Diffusion with BBR3 in Solar Cell Productionen
dc.type.driverconferenceObjecten
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
eprints.affiliatedInstitution.departmentFakulta elektrotechniky a komunikačních technologiícs
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