Simulation And Fabrication Of Piezoelectric Mems Resonators

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but.event.date27.04.2017cs
but.event.titleStudent EEICT 2017cs
dc.contributor.authorKlempa, Jaroslav
dc.date.accessioned2020-05-07T09:40:25Z
dc.date.available2020-05-07T09:40:25Z
dc.date.issued2017cs
dc.description.abstractThis paper presents FEM analyses and fabrication of piezoelectric MEMS resonators. Modal and harmonic analyses were made using Ansys® Workbench. These simulations showed the influence of resonators geometry on their out-of-plane displacement and corresponding resonant frequencies. Piezoelectric resonators were fabricated by standard microfabrication processing compatible with complementary metal-oxide-semiconductor (CMOS) technology.en
dc.formattextcs
dc.format.extent102-104cs
dc.format.mimetypeapplication/pdfen
dc.identifier.citationProceedings of the 23st Conference STUDENT EEICT 2017. s. 102-104. ISBN 978-80-214-5496-5cs
dc.identifier.isbn978-80-214-5496-5
dc.identifier.urihttp://hdl.handle.net/11012/187050
dc.language.isoencs
dc.publisherVysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologiícs
dc.relation.ispartofProceedings of the 23st Conference STUDENT EEICT 2017en
dc.relation.urihttp://www.feec.vutbr.cz/EEICT/cs
dc.rights© Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologiícs
dc.rights.accessopenAccessen
dc.subjectPiezoelectric resonatoren
dc.subjectMEMSen
dc.subjectthin filmsen
dc.subjectFEM analysesen
dc.titleSimulation And Fabrication Of Piezoelectric Mems Resonatorsen
dc.type.driverconferenceObjecten
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
eprints.affiliatedInstitution.departmentFakulta elektrotechniky a komunikačních technologiícs
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