Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration

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dc.contributor.authorSkoupý, Radimcs
dc.contributor.authorFořt, Tomášcs
dc.contributor.authorKrzyžánek, Vladislavcs
dc.coverage.issue2cs
dc.coverage.volume10cs
dc.date.accessioned2021-01-29T15:57:39Z
dc.date.available2021-01-29T15:57:39Z
dc.date.issued2020-02-15cs
dc.description.abstractThe thickness of electron transparent samples can be measured in an electron microscope using several imaging techniques like electron energy loss spectroscopy (EELS) or quantitative scanning transmission electron microscopy (STEM). We extrapolate this method for using a back-scattered electron (BSE) detector in the scanning electron microscope (SEM). This brings the opportunity to measure the thickness not just of the electron transparent samples on TEM mesh grids, but, in addition, also the thickness of thin films on substrates. Nevertheless, the geometry of the microscope and the BSE detector poses a problem with precise calibration of the detector. We present a simple method which can be used for such a type of detector calibration that allows absolute (standardless) measurement of thickness, together with a proof of the method on test samples.en
dc.formattextcs
dc.format.extent1-11cs
dc.format.mimetypeapplication/pdfcs
dc.identifier.citationNanomaterials. 2020, vol. 10, issue 2, p. 1-11.en
dc.identifier.doi10.3390/nano10020332cs
dc.identifier.issn2079-4991cs
dc.identifier.other164642cs
dc.identifier.urihttp://hdl.handle.net/11012/195942
dc.language.isoencs
dc.publisherMDPIcs
dc.relation.ispartofNanomaterialscs
dc.relation.urihttps://www.mdpi.com/2079-4991/10/2/332cs
dc.rightsCreative Commons Attribution 4.0 Internationalcs
dc.rights.accessopenAccesscs
dc.rights.sherpahttp://www.sherpa.ac.uk/romeo/issn/2079-4991/cs
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/cs
dc.subjectSEMen
dc.subjectquantitative imagingen
dc.subjectback-scattered electronsen
dc.subjectstandardless calibrationen
dc.subjectelectron mirroren
dc.subjectsample biasen
dc.subjectMonte Carlo simulationen
dc.subjectthin coating layersen
dc.titleNanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibrationen
dc.type.driverarticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen
sync.item.dbidVAV-164642en
sync.item.dbtypeVAVen
sync.item.insts2021.01.29 16:57:39en
sync.item.modts2021.01.29 16:16:08en
thesis.grantorVysoké učení technické v Brně. Fakulta strojního inženýrství. Ústav fyzikálního inženýrstvícs
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