Calibration Of Precision Rotary Table Using Laser Interferometer System

Abstract

Calibration of a rotary axis can be useful to determine angular deviations throughout themeasuring range. Specified accuracy presented in the specification list represents the worst case,therefore information about magnitudes of deviations of individual measuring points are unknown.The resulting error map of the device under test allows correction of the indicated value. As a result,the measurement accuracy of the device can be increased. Calibration of a precision rotary table wasperformed using a Keysight 5530 laser interferometer system. The presented paper briefly describesthe fundamentals of this portable calibrating system. Also, the results and accuracies are discussed.