Electric field and higher harmonics of RF plasma slit jet measured by antennas and VI probes
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Date
2024-05-29
Authors
Polášková, Kateřina
Drexler, Petr
Klíma, Miloš
Macháč, Jan
Nečas, David
Švanda, Milan
Zajíčková, Lenka
0000-0002-2687-9274Advisor
Referee
Mark
Journal Title
Journal ISSN
Volume Title
Publisher
IOP Publishing
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Abstract
The cold atmospheric plasma jets change their character when interacting with the different surfaces. Since such interaction is the primary area of plasma jet applications, it is essential to monitor the process. The non-linearity of the RF plasma slit jet (PSJ) was analyzed using the VI probes and a novel method, the non-intrusive antenna measurements. Regardless of the experimental setup and gas mixture (Ar, Ar/O2, Ar/N2), the PSJ frequency spectrum consisted of the following main features: dominant fundamental frequency peak, relatively strong odd harmonics, and significantly weaker even harmonics. The lowest degree of non-linearity was recorded for the Ar PSJ ignited against a grounded target. Admixing a molecular gas increased the discharge non-linearity. It was attributed to the enhancement of secondary electron emission from the dielectric surfaces. In addition to the non-linearity analysis, the antenna spectra were for the first time used to determine the semi-quantitative values of the PSJ-radiated electric field. The electric fields decreased by a factor of 2 after the admixing of nitrogen and oxygen molecular gases. Out of the studied targets, the highest electric fields were observed when plasma impinged on the grounded targets, followed by the floating target (2x lower) and the PSJ ignited in the open space configuration (4x lower than in the grounded target configuration).
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Citation
PLASMA SOURCES SCIENCE & TECHNOLOGY. 2024, vol. 33, issue 5, p. 1-16.
https://iopscience.iop.org/article/10.1088/1361-6595/ad48b5
https://iopscience.iop.org/article/10.1088/1361-6595/ad48b5
Document type
Peer-reviewed
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Published version
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Language of document
en