Pressure Sensing Using Ltcc Technology

Abstract

This paper deal with the design, manufacturing and measurement of optical pressure sensors produced using Low Temperature Co-fired Ceramic technology. There is brief overview of measurement methods used for pressure sensor interrogation. Benefits and problems regarding measurement methods are discussed. Pressure transducers are based on the change of the light spectrum reflected from the Fiber Bragg Grating integrated in the sensor. Low Temperature Co-fired Ceramic structure with membrane was used for the forming of a pressure transducer. Samples of fiber optic sensors are calibrated using reference pressure measurement and characteristics of the sensors are measured. Pressure sensors for different pressure ranges were measured and tested.