Transparent materials for planar microelectrode arrays

Abstract

This paper is focused on indium tin oxide (ITO), ultrathin gold, titanium nitride (TiN) and diamond-like carbon (DLC) thin films that can be used for transparent or semitransparent electrodes and interconnects for planar microelectrode arrays. Paper further describes methods of thin film deposition of selected materials, microfabrication of planar microelectrode arrays, their preparation for electrochemical measurement and results of electrochemical impedance spectroscopy and cyclic voltammetry.