Transparent materials for planar microelectrode arrays
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Date
2024
Authors
Jarušek, Jaromír
Brodský, Jan
Gablech, Imrich
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Mark
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Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií
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Abstract
This paper is focused on indium tin oxide (ITO), ultrathin gold, titanium nitride (TiN) and diamond-like carbon (DLC) thin films that can be used for transparent or semitransparent electrodes and interconnects for planar microelectrode arrays. Paper further describes methods of thin film deposition of selected materials, microfabrication of planar microelectrode arrays, their preparation for electrochemical measurement and results of electrochemical impedance spectroscopy and cyclic voltammetry.
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Proceedings II of the 30st Conference STUDENT EEICT 2024: Selected papers. s. 113-116. ISBN 978-80-214-6230-4
https://www.eeict.cz/eeict_download/archiv/sborniky/EEICT_2024_sbornik_2.pdf
https://www.eeict.cz/eeict_download/archiv/sborniky/EEICT_2024_sbornik_2.pdf
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Peer-reviewed
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en
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© Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií